Open RGA File

The RGA format and extension files are associated with Residual Gas Analyzer, hence the acronym.

The RGA format stores the data that comes from said device, which is a gaseous mass spectrometer designed for process control and contamination monitoring in vacuum systems.

RGA uses two implementations, which are an open ion source (OIS) or a closed ion source (CIS).

The RGA format is used, in this type of device, to save data from high vacuum applications such as research chambers, surface science setups, accelerators, scanning microscopes, etc.

The impurity and vacuum quality data is also recorded in an RGA file, within the low-pressure gas environment.

The RGA format, in itself, is an obsolete format and is not, today, associated with any updated software.